Summary
I work on plasma potential measurements in low temperature plasmas, specifically beam probe diagnostics.
Institution
University of Texas at Austin
Tags
Plasma physics
semiconductor manufacturing, plasma potential, Low temperature plasma, Beam probe
Recently published
| Title | Replies |
Last Post |
|---|---|---|
| Izpitec and a new plasma potential measurement | 16 | 09/03/2010 - 18:44 |
