Yasunori Ohtsu

Summary

Main research interest is plasma processing and waste treatment as following themes;Preparation of ultra water repellent films by plasma, Production of radio frequency and Microwave plasmas, Treatment of medical waste by microwave and Production of atmospheric plasma Jet for surface treatment

Institution

Saga University

Tags

Electrical engineering

RF and Microwave, Plasma production, Plasma Processing, Functional thin film

Recently published

Title	Replies	Last Post
Improvement of a dual frequency sputtering device for higher deposition rates of protective zirconium oxide films on ceramic		04/09/2010 - 03:09
Two-Dimensional Spatial Structure of Inductively Coupled Plasma with One Internal Loop Antenna		04/09/2010 - 03:08
Production of high-density capacitively coupled plasma with RF multi-hollow cathode and/or high secondary electron emission for DLC film preparation		04/09/2010 - 03:04
Production of capacitively coupled atmospheric plasma jet with multiring-electrodes for the medical plasma tool		04/09/2010 - 03:00